Static response of miniature capacitive pressure sensors with square or rectangular silicon diaphragm
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Revue de Physique Appliquée
سال: 1987
ISSN: 0035-1687
DOI: 10.1051/rphysap:01987002207050500